A. L. Chicherskaya, A. A. Pupyshev


The numerical values of the cathode sputtering rate of the materials are needed to conduct the layered analysis and produce multi-matrix calibration dependencies using the method of atomic emission spectrometry glow discharge. In the current work the cathode sputtering rate in DC glow discharge was measured for 26 elements. A comparison with published data showed good consistency of the results and confirmed the need for such measurements for the specific conditions of the analysis. It was determined that the values of the cathode sputtering rate of elements are dependent on their physicochemical characteristics in a complex manner. The relationship between the cathode sputtering rate of elements with their physical and chemical properties such as atomic number, atomic weight, melting and boiling points, the sublimation energy and the energy of the crystal lattice was studied in a great detail. The periodic dependence of the values of the sputtering rate of elements from their atomic number and atomic mass was demonstrated and also confirmed by the published data. According to the P. Sigmund’s theory of sputtering solids and semi-empirical equation of the sputtering coefficient it was found that the cathode sputtering rate of the material depends on the energy of sublimation i.e. it is determined by the values of its atomic radius, melting point and density. The found relationship was confirmed by the statistical calculations using both linear and non-linear regression. The discovered dependence of the cathode sputtering rate from the physicochemical characteristics of the metal allows predicting the velocity dispersion of the material, identify erroneous measurements and evaluate the limits of applicability of the analysis method.

Keyword: atomic-emission spectrometry, current direct glow discharge, the sputtering rate of metals, physical-chemical properties of metals, theory spraying solids, sputtering coefficient.   


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